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Derniers dépôts
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Thibaut Meyer, Aurélie Girard, Christophe Cardinaud, Marek Bouška, Emeline Baudet, et al.. Investigation of plasma species, etch products and surface modification during etching of Ge, Sb and Se-based materials in CH 4 -H 2 -Ar plasmas. 25th International Symposium on Plasma Chemistry (ISPC25), May 2023, Kyoto, Japan. ⟨hal-04675793⟩
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T Meyer, A Girard, M Bouska, E Baudet, M Baillieul, et al.. Investigation of plasma species, etch products and surface modification during etching of Ge, Sb and Se-based materials in CH4-H2-Ar plasmas. 25th International Symposium on Plasma Chemistry (ISPC25), Takayuki Watanabe - Kyushu University; Satoshi Hamaguchi - Osaka University, May 2023, Kyoto, Japan. ⟨hal-04675788⟩
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S Chouteau, A Durocher-Jean, A Granier, M Richard-Plouet, L Stafford. Time-resolved analysis of Ar metastable and electron populations in low-pressure misty plasma processes using optical emission spectroscopy. Plasma Sources Science and Technology, 2024, 33 (7), pp.075016. ⟨10.1088/1361-6595/ad5d11⟩. ⟨hal-04672943⟩
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Simon Chouteau, L. Stafford, Agnès Granier, Antoine Goullet, Mireille Richard-Plouet. Handling Nanoparticle Content in Nanocomposite Thin Films Deposited by Misty Plasma Processes through Controlled Flash Boiling Atomization. Langmuir, 2024, 40 (6), pp.3015-3023. ⟨10.1021/acs.langmuir.3c03176⟩. ⟨hal-04549282⟩
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Issraa Shahine, Quentin Hatte, Maxime Harnois, Pierre-Yves Tessier. Large Area Freestanding Au Nanoporous Ultrathin Films Transfer Printed on Bendable Substrates and 3D Surfaces for Flexible Electronics. ACS Applied Electronic Materials, 2024, 6 (4), pp.2281-2288. ⟨10.1021/acsaelm.3c01771⟩. ⟨hal-04552765⟩
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Pascal Bargiela, Vincent Fernandez, Christophe Cardinaud, John Walton, Mark Greiner, et al.. Towards a reliable assessment of charging effects during surface analysis: Accurate spectral shapes of ZrO2 and Pd/ZrO2 via X-ray Photoelectron Spectroscopy. Applied Surface Science, 2021, 566, pp.150728. ⟨10.1016/j.apsusc.2021.150728⟩. ⟨hal-03355769⟩
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Allan Lebreton, Marie-Paule Besland, Pierre-Yves Jouan, Tatiana Signe, Cédric Mannequin, et al.. Control of microstructure and composition of reactively sputtered vanadium nitride thin films based on hysteresis curves and application to microsupercapacitors. Journal of Vacuum Science & Technology A, 2024, 42 (2), pp.023405. ⟨10.1116/5.0177028⟩. ⟨hal-04423908⟩
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Michael Rodriguez-Fano, Mohamad Haydoura, Julien Tranchant, Etienne Janod, Benoît Corraze, et al.. Enhancing the Resistive Memory Window through Band Gap Tuning in Solid Solution (Cr1–xVx)2O3. ACS Applied Materials & Interfaces, 2023, 15 (47), pp.54611-54621. ⟨10.1021/acsami.3c09387⟩. ⟨hal-04361024⟩
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J. Zgheib, L. Berthelot, J. Tranchant, N. Ginot, M.-P. Besland, et al.. Electron-enhanced high power impulse magnetron sputtering with a multilevel high power supply: Application to Ar/Cr plasma discharge. Journal of Vacuum Science & Technology A, 2023, 41 (6), pp.063003. ⟨10.1116/6.0002857⟩. ⟨hal-04299303⟩
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Nombre de documents
82
Nombre de notices
294
Mots-clés
Optical waveguides
Chalcogenide
Resistive switching
Atomic layer etching
Mott insulators
AZO thin films
Thin films
CaTiO3Pr^3^+
Bipolar resistive switching BRS
Band gap
Transfert d'énergie
XPS
Nanocomposite
Carbon
Scanning electron microscopy
Optical properties
BOMBARDMENT
Alzheimer's disease
Biofilms microbiens
Ablation laser
Argon InP chlorine etching inductive coupled plasma ICP modeling plasma sheath simulation
Annealing
Integrated optics
Plasmas froids
B1 Inorganic compounds
Buffer Couple
Atomic force microscopy
Calcined clay
Residual stress
Thin film
Titanium dioxide
Mott insulator
Ambipolar material
B Chemical synthesis
Rutile
Capacitance
Alloying
3 nm in size
AuCu alloy
CHLORINE PLASMAS
Nanotubes
Etching
Biocapteurs
A Thin films
Anatase
Transmission electron microscopy
A-CNx
Bixbyite
Spectroscopic ellipsometry
Amyloid precursor
Oxides
Adsorption
Vanadium Sesquioxide
AlN
TiO2
B2 Semiconducting indium compounds
Physical vapor deposition
Films
PECVD
Non-volatile memory
Biomembranes
Biomasse
Kirkendall effect
B2 Quaternary
X-ray diffraction
A3 Physical vapor deposition processes
Sol-gel
CIGSe
SF 6
A1 Characterization
CH4
Sputtering
Low-pressure plasma processing
B2 Semiconducting alloys
X-ray photoelectron spectroscopy
Amorphous
A Multilayers
A Chalcogenides
Colloidal solution
Mass spectrometry
Copper
Magnetron sputtering
Semiconductors
Plasma etching
Optical interferometry
Aluminium nitride
Band alignment
Functionalization
B3 Solar cells
Aryl-diazonium salts
Selenization
Structure
V2O3
CNTs’ collapse
NEXAFS
Applications industrielles
C Photoelectron spectroscopy
TEM
Avalanche breakdown
Carbon Nanotube